6N Grade(99.9999%)
| Purity | wt% | 99.9999 up | |||||
|---|---|---|---|---|---|---|---|
| Impurity | ppm(wt) | Element | Standard | D.Limit | Element | Standard | D.Limit |
| F Na Al Si P S Cl K Ca Cr Mn |
< 0.1 < 0.1 < 0.2 < 0.5 < 0.1 < 0.5 < 0.2 < 0.2 < 0.2 < 0.2 < 0.4 | 0.01 0.01 0.01 0.01 0.01 0.01 0.01 0.01 0.05 0.05 0.01 |
Fe Ni Cu As Ag Cd Sn Sb Te Tl Pb |
< 0.3 < 0.2 < 0.2 < 0.05 < 0.05 < 0.5 < 0.2 < 0.2 < 0.2 < 0.2 < 0.5 | 0.05 0.01 0.05 0.01 0.01 0.5 0.05 0.01 0.05 0.01 0.01 |
||
* D.Limit = Detection Limit
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